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製品紹介

真空薄膜形成装置 / 成膜装置

表面分析装置

真空搬送システム

真空部品・コンポーネント

その他各種取扱製品

イオンポンプ

VacIon Plusシリーズ / Miniature Pump / Small Vaclon Pump

イオンポンプ

1950年代、バリアンがイオンポンプを開発して以来、イオンポンプに対する主要な技術革新のすべてを行ってきたアジレント(バリアン)のイオンポンプです。

受け継がれて来た高品質・高信頼性のイオンポンプは世界各国で高い評価を得ており、現在も、これからも、アジレント(バリアン)はワールドワイドのトップシェアブランドです。

機器構成/アクセサリー

Miniature Pump 品 番
Miniature Pump 9130038(3/8" OD 180° stainless steel tube)
9130041(3/8" OD 90° stainless steel tube)
9130049(3/8" OD 180° copper tube)
9130050(3/8" OD 90° copper tube)
Magnet for Miniature pump 9130042
Mini Vac Controller, KING HV connector 9290190(120V)
9290291(220V)
9290197(24VDC)
電源ケーブル 9699958(120V)
HV cable for Mini VacIon pumps 9240122(2.4m)
2L/s Pump 品 番
2L/s Pump 9190521(3/4" OD 180° stainless steel tube)
9190522(3/4" OD 180° copper tube, vacuum processed)
9190523(3/4" OD 180° stainless steel tube, vacuum processed)
9190524(3/4" OD 90° stainless steel tube, tee style)
9190520(ICF34 180° vacuum processed)
Magnet for 2L/s Pump 91900382
Mini Vac Controller, KING HV connector 9290190(120V)
9290291(220V)
9290197(24VDC)
電源ケーブル 9699958(120V)
HV bakeable cable for 2L/s pump 9290706(4m radiation resistant with interlock)
10L/s Pump 品 番
10L/s Vaclon pump 9195005(ICF70 vacuum processed)
Magnet assembly for 10L/s Vaclon pump 9110030
Mini Vac Controller, KING HV connector 9290190(120V)
9290291(220V)
9290197(24VDC)
電源ケーブル 9699958(120V)
HV cable for 10L/s VacIon pumps 9240741(3m)
VacIon Plus 20 品 番
VacIon Plus 20ポンプ 9191115(Diode with Ferrite magnets)
9191114(Diode without magnets)
9191145(StarCell with Ferrite magnets)
9191144(StarCell without magnets)
4UHV Controllerで制御する場合
4UHV Controller
(最大4台のイオンポンプを制御可能)

  • Diode, Noble Diode : positive
  • StarCell, Triode : negative
9299100(1 x 120W negative)
9299101(1 x 120W positive)
9299010(1 x 200W negative)
9299011(1 x 200W positive)
9299200(2 x 80W negative)
9299201(2 x 80W positive)
9299020(2 x 200W negative)
9299021(2 x 200W positive)
9299022(1 x 200W positive & 1 x 200W negative)
9299400(4 x 80W negative)
9299401(4 x 80W positive)
9299402(2 x 80W positive & 2 x 80W negative)
9299210(2 x 80W negative & 1 x 200W negative)
9299211(2 x 80W positive & 1 x 200W positive)
9299212(2 x 80W positive & 1 x 200W negative)
9299213(2 x 80W negative & 1 x 200W positive)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock)
9290707(7m, radiation resistant with interlock)
9290708(10m, radiation resistant with interlock)
9290709(20m, radiation resistant with interlock)
Mini Vac Controllerで制御する場合
Mini Vac Controller, FISCHER HV connector 9290191(120V,1 x 21W negative)
9290290(220V,1 x 21W negative)
9290196(24VDC,1 x 21W negative)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock)
9290707(7m, radiation resistant with interlock)
9290708(10m, radiation resistant with interlock)
9290709(20m, radiation resistant with interlock)
VacIon Plus 40 品 番
VacIon Plus 40ポンプ 9191210(Diode)
9191213(Diode with additional ICF70 port)
9191214(Diode without magnets)
9191240(StarCell)
9191243(StarCell with additional ICF70 port)
9191244(StarCell without magnets)
4UHV Controllerで制御する場合
4UHV Controller
(最大4台のイオンポンプを制御可能)

  • Diode, Noble Diode : positive
  • StarCell, Triode : negative
9299100(1 x 120W negative)
9299101(1 x 120W positive)
9299010(1 x 200W negative)
9299011(1 x 200W positive)
9299200(2 x 80W negative)
9299201(2 x 80W positive)
9299020(2 x 200W negative)
9299021(2 x 200W positive)
9299022(1 x 200W positive & 1 x 200W negative)
9299400(4 x 80W negative)
9299401(4 x 80W positive)
9299402(2 x 80W positive & 2 x 80W negative)
9299210(2 x 80W negative & 1 x 200W negative)
9299211(2 x 80W positive & 1 x 200W positive)
9299212(2 x 80W positive & 1 x 200W negative)
9299213(2 x 80W negative & 1 x 200W positive)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock)
9290707(7m, radiation resistant with interlock)
9290708(10m, radiation resistant with interlock)
9290709(20m, radiation resistant with interlock)
Mini Vac Controllerで制御する場合
Mini Vac Controller, FISCHER HV connector 9290191(120V,1 x 21W negative)
9290290(220V,1 x 21W negative)
9290196(24VDC,1 x 21W negative)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock)
9290707(7m, radiation resistant with interlock)
9290708(10m, radiation resistant with interlock)
9290709(20m, radiation resistant with interlock)
VacIon Plus 55 品 番
VacIon Plus 55ポンプ 9191310(Diode)
9191313(Diode with additional ICF70 port)
9191314(Diode without magnets)
9191340(StarCell)
9191343(StarCell with additional ICF70 port)
9191344(StarCell without magnets)
4UHV Controllerで制御する場合
4UHV Controller
(最大4台のイオンポンプを制御可能)

  • Diode, Noble Diode : positive
  • StarCell, Triode : negative
9299100(1 x 120W negative)
9299101(1 x 120W positive)
9299010(1 x 200W negative)
9299011(1 x 200W positive)
9299200(2 x 80W negative)
9299201(2 x 80W positive)
9299020(2 x 200W negative)
9299021(2 x 200W positive)
9299022(1 x 200W positive & 1 x 200W negative)
9299400(4 x 80W negative)
9299401(4 x 80W positive)
9299402(2 x 80W positive & 2 x 80W negative)
9299210(2 x 80W negative & 1 x 200W negative)
9299211(2 x 80W positive & 1 x 200W positive)
9299212(2 x 80W positive & 1 x 200W negative)
9299213(2 x 80W negative & 1 x 200W positive)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock)
9290707(7m, radiation resistant with interlock)
9290708(10m, radiation resistant with interlock)
9290709(20m, radiation resistant with interlock)
Mini Vac Controllerで制御する場合
Mini Vac Controller, FISCHER HV connector 9290191(120V,1 x 21W negative)
9290290(220V,1 x 21W negative)
9290196(24VDC,1 x 21W negative)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock)
9290707(7m, radiation resistant with interlock)
9290708(10m, radiation resistant with interlock)
9290709(20m, radiation resistant with interlock)
VacIon Plus 75 品 番
VacIon Plus 75ポンプ 9191410(Diode)
9191413(Diode with additional ICF70 port)
9191414(Diode without magnets)
9191440(StarCell)
9191443(StarCell with additional ICF70 port)
9191444(StarCell without magnets)
4UHV Controllerで制御する場合
4UHV Controller
(最大4台のイオンポンプを制御可能)

  • Diode, Noble Diode : positive
  • StarCell, Triode : negative
9299100(1 x 120W negative)
9299101(1 x 120W positive)
9299010(1 x 200W negative)
9299011(1 x 200W positive)
9299200(2 x 80W negative)
9299201(2 x 80W positive)
9299020(2 x 200W negative)
9299021(2 x 200W positive)
9299022(1 x 200W positive & 1 x 200W negative)
9299400(4 x 80W negative)
9299401(4 x 80W positive)
9299402(2 x 80W positive & 2 x 80W negative)
9299210(2 x 80W negative & 1 x 200W negative)
9299211(2 x 80W positive & 1 x 200W positive)
9299212(2 x 80W positive & 1 x 200W negative)
9299213(2 x 80W negative & 1 x 200W positive)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock)
9290707(7m, radiation resistant with interlock)
9290708(10m, radiation resistant with interlock)
9290709(20m, radiation resistant with interlock)
Mini Vac Controllerで制御する場合
Mini Vac Controller, FISCHER HV connector 9290191(120V,1 x 21W negative)
9290290(220V,1 x 21W negative)
9290196(24VDC,1 x 21W negative)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock)
9290707(7m, radiation resistant with interlock)
9290708(10m, radiation resistant with interlock)
9290709(20m, radiation resistant with interlock)
VacIon Plus 150 品 番
VacIon Plus 150ポンプ 9191510(Diode)
9191511(Diode with heaters installed 120V)
9191512(Diode with heaters installed 220V)
9191550(Diode double-ended)
9191551(Diode double-ended with heaters installed 120V)
9191552(Diode double-ended with heaters installed 220V)
9191540(StarCell)
9191541(StarCell with heaters installed 120V)
9191542(StarCell with heaters installed 220V)
9191580(StarCell double-ended)
9191581(StarCell double-ended with heaters installed 120V)
9191582(StarCell double-ended with heaters installed 220V)
4UHV Controllerで制御する場合
4UHV Controller
(最大4台のイオンポンプを制御可能)

  • Diode, Noble Diode : positive
  • StarCell, Triode : negative
9299100(1 x 120W negative)
9299101(1 x 120W positive)
9299010(1 x 200W negative)
9299011(1 x 200W positive)
9299200(2 x 80W negative)
9299201(2 x 80W positive)
9299020(2 x 200W negative)
9299021(2 x 200W positive)
9299022(1 x 200W positive & 1 x 200W negative)
9299400(4 x 80W negative)
9299401(4 x 80W positive)
9299402(2 x 80W positive & 2 x 80W negative)
9299210(2 x 80W negative & 1 x 200W negative)
9299211(2 x 80W positive & 1 x 200W positive)
9299212(2 x 80W positive & 1 x 200W negative)
9299213(2 x 80W negative & 1 x 200W positive)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock)
9290707(7m, radiation resistant with interlock)
9290708(10m, radiation resistant with interlock)
9290709(20m, radiation resistant with interlock)
VacIon Plus 200 品 番
VacIon Plus 200ポンプ
(Fischer feedthrough)
X3601-64000(Diode)
X3601-64002(Diode with heaters 120V)
X3601-64004(Diode with heaters 220V)
X3601-64001(Diode with ICF70 side port)
X3601-64003(Diode with ICF70 side port with heaters 120V)
X3601-64005(Diode with ICF70 side port with heaters 220V)
X3601-64018(Noble Diode)
X3601-64020(Noble Diode with heaters 120V)
X3601-64022(Noble Diode with heaters 220V)
X3601-64019(Noble Diode with ICF70 side port)
X3601-64021(Noble Diode with ICF70 side port with heaters 120V)
X3601-64023(Noble Diode with ICF70 side port with heaters 220V)
X3601-64040(StarCell)
X3601-64042(StarCell with heaters 120V)
X3601-64044(StarCell with heaters 220V)
X3601-64041(StarCell with ICF70 side port)
X3601-64043(StarCell with ICF70 side port with heaters 120V)
X3601-64045(StarCell with ICF70 side port with heaters 220V)
VacIon Plus 200ポンプ
(SHV feedthrough)
X3601-64012(Diode)
X3601-64014(Diode with heaters 120V)
X3601-64016(Diode with heaters 220V)
X3601-64013(Diode with ICF70 side port)
X3601-64015(Diode with ICF70 side port with heaters 120V)
X3601-64017(Diode with ICF70 side port with heaters 220V)
X3601-64030(Noble Diode)
X3601-64032(Noble Diode with heaters 120V)
X3601-64034(Noble Diode with heaters 220V)
X3601-64031(Noble Diode with ICF70 side port)
X3601-64033(Noble Diode with ICF70 side port with heaters 120V)
X3601-64035(Noble Diode with ICF70 side port with heaters 220V)
X3601-64052(StarCell)
X3601-64054(StarCell with heaters 120V)
X3601-64056(StarCell with heaters 220V)
X3601-64053(StarCell with ICF70 side port)
X3601-64055(StarCell with ICF70 side port with heaters 120V)
X3601-64057(StarCell with ICF70 side port with heaters 220V)
4UHV Controllerで制御する場合
4UHV Controller
(最大4台のイオンポンプを制御可能)

  • Diode, Noble Diode : positive
  • StarCell, Triode : negative
9299100(1 x 120W negative)
9299101(1 x 120W positive)
9299010(1 x 200W negative)
9299011(1 x 200W positive)
9299200(2 x 80W negative)
9299201(2 x 80W positive)
9299020(2 x 200W negative)
9299021(2 x 200W positive)
9299022(1 x 200W positive & 1 x 200W negative)
9299400(4 x 80W negative)
9299401(4 x 80W positive)
9299402(2 x 80W positive & 2 x 80W negative)
9299210(2 x 80W negative & 1 x 200W negative)
9299211(2 x 80W positive & 1 x 200W positive)
9299212(2 x 80W positive & 1 x 200W negative)
9299213(2 x 80W negative & 1 x 200W positive)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock for Fischer F/T)
9290707(7m, radiation resistant with interlock for Fischer F/T)
9290708(10m, radiation resistant with interlock for Fischer F/T)
9290709(20m, radiation resistant with interlock for Fischer F/T)
9297010M023(4m, radiation resistant with interlock for SHV F/T)
9297010M025(10m, radiation resistant with interlock for SHV F/T)
VacIon Plus 300 品 番
VacIon Plus 300ポンプ 9191610(Diode)
9191611(Diode with heaters installed 120V)
9191612(Diode with heaters installed 220V)
9191650(Diode double-ended)
9191651(Diode double-ended with heaters installed 120V)
9191652(Diode double-ended with heaters installed 220V)
9191640(StarCell)
9191641(StarCell with heaters installed 120V)
9191642(StarCell with heaters installed 220V)
9191680(StarCell double-ended)
9191681(StarCell double-ended with heaters installed 120V)
9191682(StarCell double-ended with heaters installed 220V)
4UHV Controllerで制御する場合
4UHV Controller
(最大4台のイオンポンプを制御可能)

  • Diode, Noble Diode : positive
  • StarCell, Triode : negative
9299100(1 x 120W negative)
9299101(1 x 120W positive)
9299010(1 x 200W negative)
9299011(1 x 200W positive)
9299200(2 x 80W negative)
9299201(2 x 80W positive)
9299020(2 x 200W negative)
9299021(2 x 200W positive)
9299022(1 x 200W positive & 1 x 200W negative)
9299400(4 x 80W negative)
9299401(4 x 80W positive)
9299402(2 x 80W positive & 2 x 80W negative)
9299210(2 x 80W negative & 1 x 200W negative)
9299211(2 x 80W positive & 1 x 200W positive)
9299212(2 x 80W positive & 1 x 200W negative)
9299213(2 x 80W negative & 1 x 200W positive)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock)
9290707(7m, radiation resistant with interlock)
9290708(10m, radiation resistant with interlock)
9290709(20m, radiation resistant with interlock)
VacIon Plus 500 品 番
VacIon Plus 500ポンプ 9191710(Diode)
9191711(Diode with heaters installed 120V)
9191712(Diode with heaters installed 220V)
9191750(Diode double-ended)
9191751(Diode double-ended with heaters installed 120V)
9191752(Diode double-ended with heaters installed 220V)
9191740(StarCell)
9191741(StarCell with heaters installed 120V)
9191742(StarCell with heaters installed 220V)
9191780(StarCell double-ended)
9191781(StarCell double-ended with heaters installed 120V)
9191782(StarCell double-ended with heaters installed 220V)
4UHV Controllerで制御する場合
4UHV Controller
(最大4台のイオンポンプを制御可能)

  • Diode, Noble Diode : positive
  • StarCell, Triode : negative
9299100(1 x 120W negative)
9299101(1 x 120W positive)
9299010(1 x 200W negative)
9299011(1 x 200W positive)
9299200(2 x 80W negative)
9299201(2 x 80W positive)
9299020(2 x 200W negative)
9299021(2 x 200W positive)
9299022(1 x 200W positive & 1 x 200W negative)
9299400(4 x 80W negative)
9299401(4 x 80W positive)
9299402(2 x 80W positive & 2 x 80W negative)
9299210(2 x 80W negative & 1 x 200W negative)
9299211(2 x 80W positive & 1 x 200W positive)
9299212(2 x 80W positive & 1 x 200W negative)
9299213(2 x 80W negative & 1 x 200W positive)
電源ケーブル 9699958(120V)
HV Bakeable cable 9290705(4m, radiation resistant with interlock)
9290707(7m, radiation resistant with interlock)
9290708(10m, radiation resistant with interlock)
9290709(20m, radiation resistant with interlock)
上記内容は、予告なく変更する場合がございますので予めご了承ください。
また、Noble Diode や上記にないイオンポンプおよびアクセサリーに関しては弊社までお問い合わせ下さい。

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